Photonics Research Group Home
Ghent University Journals/Proceedings
About People Research Publications Education Services


Publication detail

Authors: I. Ansari, K. De Geest, J. De Witte, T. Vandekerckhove, H. Rijckaert, E. Picavet, E. Lievens, G.F Feutmba, T. Van de Veire, B. Kuyken, J. Beeckman, D. Van Thourhout
Title: PZT micro-transfer printing for photonic MEMS
Format: International Conference Presentation
Publication date: 11/2023
Journal/Conference/Book: IEEE Photonics Conference
Editor/Publisher: IEEE, 
Volume(Issue): p.paper TuE3.3
Location: Orlando, United States
DOI: 10.1109/IPC57732.2023.10360713
Citations: Look up on Google Scholar
Download: Download this Publication (1.3MB) (1.3MB)


This paper demonstrates micro-transfer printing of a photonics-compatible lead zirconate titanate (PZT) film. The PZT coupons were released by etching the underlying SiO2 layer with HF vapor and successfully transferred onto a Si substrate. This technique enables the realization of piezo-MEMS for photonics applications.

Related Research Topics

Related Projects

Back to publication list