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Authors: P. Edinger, G. Jo, C.P.V. Nguyen, A.Y. Takabayashi, C. Errando-Herranz, C. Antony, G. Talli, P. Verheyen, U. Khan, S.J. Bleiker, W. Bogaerts, N. Quack, F. Niklaus, K.B Gylfason
Title: A vacuum-sealed silicon photonic MEMS tunable ring resonator with independent control over coupling and phase
Format: International Journal
Publication date: 2/2023
Journal/Conference/Book: Optics Express
DOI: 10.1364/OE.480219
Citations: 4 ( - last update: 9/6/2024)
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Ring resonators are a vital element for filters, optical delay lines, or sensors in silicon photonics. However, reconfigurable ring resonators with low-power consumption and good optical performance are not available in foundries today. We demonstrate an add-drop ring resonator with the independent tuning of coupling and round-trip phase using low-power microelectromechanical (MEMS) actuation. The MEMS rings are individually vacuum-sealed on wafer scale, enabling reliable long-term operation with no observable degradation after more than 4.10E9 cycles at 100 kHz. On resonance, we demonstrate a modulation increase of up to 15 dB, with a voltage bias of 4V and a peak drive amplitude as low as 20mV.

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