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Authors: P. Edinger, A.Y. Takabayashi, C. Errando-Herranz, U. Khan, C. Antony, G. Talli, P. Verheyen, W. Bogaerts, N. Quack, K.B. Gylfason
Title: A Bistable Silicon Photonic Mems Phase Switch for Nonvolatile Photonic Circuits
Format: International Conference Proceedings
Publication date: 1/2022
Journal/Conference/Book: 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
Volume(Issue): p.995-997
Location: Tokyo, Japan
DOI: 10.1109/MEMS51670.2022.9699739
Citations: 8 ( - last update: 21/7/2024)
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Silicon photonic circuits are rapidly growing in complexity and spreading to new applications. However, programmable circuits consume much power and require active electrical interfaces. For the first time, we demonstrate a nonvolatile photonic MEMS -phase switch using dual comb-drive actuation and adhesion forces, implemented in a silicon photonics foundry. Both nonvolatile states are low-loss, display low dispersion, could be cycled through over 100 times, and have retention times over 12 hours. We believe that the demonstrated nonvolatility combined with excellent optical performance can enable a new generation of programmable photonic chips that do not consume any electrical power once (re)configured.

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