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Authors: P. Edinger, K. Kristinsson, C. Errando-Herranz, A.Y. Takabayashi, H. Sattari, N. Quack, P. Verheyen, W. Bogaerts, K.B. Gylfason
Title: Silicon photonic MEMS phase shifter with us time constant built on a foundry platform
Format: International Conference Proceedings
Publication date: 5/2021
Journal/Conference/Book: Conference on Lasers and Electro-Optics
Volume(Issue): p.STu2Q.1
DOI: 10.1364/CLEO_SI.2021.STu2Q.1
Citations: Look up on Google Scholar
Download: Download this Publication (1.1MB) (1.1MB)


MEMS enable low power tuners in silicon photonics, but existing phase shifters lack in range, speed, and loss. We implement a 2pi phase shifter with a 1.54us time constant and 0.5dB insertion loss in IMEC's iSiPP50G platform.

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