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Authors: P. Edinger, C. Errando-Herranz, A.Y. Takabayashi, H. Sattari, N. Quack, P. Verheyen, W. Bogaerts, K. Gylfason
Title: Compact low loss MEMS phase shifters for scalable field-programmable silicon photonics
Format: International Conference Proceedings
Publication date: 5/2020
Journal/Conference/Book: Conference on Lasers and Electro-Optics
Volume(Issue): p.SM3J.2
Location: San Jose, United States
Citations: Look up on Google Scholar
Download: Download this Publication (486KB) (486KB)


MEMS offer low power tunability to silicon photonics. However, reported phase shifters lack in range, IL, or linearity. We show pi linear phase shift in compact, 0.2dB-IL MEMS devices, and demonstrate trade-offs for scalability.

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