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Authors: H. Sattari, A.Y. Takabayashi, Y. Zhang, P. Verheyen, W. Bogaerts, N. Quack
Title: Compact broadband suspended silicon photonic directional coupler
Format: International Journal
Publication date: 5/2020
Journal/Conference/Book: Optics Letters
Volume(Issue): 45(11) p.2997-3000
DOI: 10.1364/OL.394470
Citations: 23 ( - last update: 9/6/2024)
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Directional couplers are extensively used in Photonic Integrated Circuits as basic components for efficient on-chip photonic signal routing. Conventionally, directional couplers are fully encapsulated in the technology’s waveguide cladding material. We here demonstrate a compact directional coupler fully suspended in air. The coupler is designed and built based on IMEC’s iSiPP50G standard platform, and HF vapor etching based post-processing allows to release the freestanding component. Low insertion loss of 0.5 dB at a wavelength of 1560 nm and a 1 dB bandwidth of 35 nm at a wavelength of 1550 nm have been confirmed experimentally. With a small footprint of 20um x 30um and high mechanical stability, this directional coupler can serve as a basic building block for large-scale silicon photonic MEMS circuits.

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