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Authors: N. Quack, H. Sattari, A.Y. Takabayashi, Y. Zhang, P. Verheyen, W. Bogaerts, P. Edinger, C. Errando-Herranz, K.B Gylfason
Title: MEMS-enabled Silicon Photonic Integrated Devices and Circuits
Format: International Journal
Publication date: 2/2020
Journal/Conference/Book: Journal of Quantum Electronics (invited)
Volume(Issue): 56(1) p.8400210
DOI: 10.1109/JQE.2019.2946841
Citations: 69 ( - last update: 21/7/2024)
41 (OpenCitations - last update: 27/6/2024)
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Photonic integrated circuits have seen a dramatic
increase in complexity over the past decades. This development has been spurred by recent applications in datacenter communications and enabled by the availability of standardized mature technology platforms. Mechanical movement of waveguiding structures at the micro- and nanoscale provides unique opportunities to further enhance functionality and to reduce power consumption in photonic integrated circuits. We here demonstrate integration of MEMS-enabled components in a simplified silicon photonics process based on IMEC's Standard Integrated Silicon Photonics Platform and a custom release process.

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