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Authors: U. Khan, Y. Xing, W. Bogaerts
Title: Parameter extraction, variability analysis and yield prediction of the photonic integrated circuits.
Format: International Conference Proceedings
Publication date: 7/2019
Journal/Conference/Book: Advanced Photonics Congress (invited)
Volume(Issue): p.paper IM3A.2
Location: Burlingame, United States
Citations: Look up on Google Scholar
Download: Download this Publication (780KB) (780KB)


We discuss the complete workflow from the extraction of behavioral and fabricated geometry parameters using optical measurements to a decomposition of spatial variability and ultimately to the layout-aware yield prediction of photonic integrated circuits (PIC).

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