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Authors: Y. Xing, M. Wang, A. Ruocco, J. Geessels, U. Khan, W. Bogaerts
Title: Extracting Multiple Parameters from a Compact Circuit for Performance Evaluation
Format: International Conference Proceedings
Publication date: 4/2019
Journal/Conference/Book: European Conference on Integrated Optics (ECIO 2019)
Volume(Issue): p.W.Po1.9
Location: Ghent, Belgium
Citations: Look up on Google Scholar
Download: Download this Publication (1.8MB) (1.8MB)


We designed a two-stage Mach-Zehnder Interferometer for process monitoring control. Using Restart-CMA-ES global optimization algorithm, we can extract multiple on-chip waveguide and directional coupler parameters simultaneously. The compact design greatly reduces the footprint and number of measurements and improves accuracy for parameter extraction, making it useful for detailed wafer-level variability analysis.

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