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Authors: Y. Xing, U. Khan, Y. Ye, W. Bogaerts
Title: Extracting Fabricated Geometry on Die-Level
Format: International Conference Poster
Publication date: 11/2017
Journal/Conference/Book: 2017 IEEE Photonics Scociety Benelux Annual Symposium
Volume(Issue): p.148-151
Location: Delft, Netherlands
Citations: Look up on Google Scholar
Download: Download this Publication (381KB) (381KB)


We extract fabricated linewidth and thickness of SOI waveguides on a die fabricated by imec MPW service. Strong local location-dependent correlation is presented in the thickness variation while no such correlation is observed for the linewidth.

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