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Authors: A. Vasiliev, A. Malik, M. Muneeb, B. Kuyken, R. Baets, G. Roelkens
Title: On-Chip Mid-Infrared Photothermal Spectroscopy using Suspended Silicon-on-Insulator Microring Resonators
Format: International Journal
Publication date: 10/2016
Journal/Conference/Book: ACS Sensors
Volume(Issue): 1(11) p.1301-1307
DOI: 10.1021/acssensors.6b00428
Citations: 44 ( - last update: 14/4/2024)
18 (OpenCitations - last update: 19/4/2024)
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Mid-infrared spectroscopic techniques rely on the specific ”fingerprint” absorption lines of molecules in the mid-infrared band to detect the presence and concentration of these molecules. Despite being very sensitive and selective, bulky and expensive equipment such as cooled mid-infrared detectors is required for conventional systems. In this paper, we demonstrate a miniature CMOS-compatible Silicon-on-Insulator (SOI) photothermal transducer for mid-infrared spectroscopy which can potentially be made in high volumes and at a low cost. The optical absorption of an analyte in the mid-infrared wavelength range (3.25–3.6 μm) is thermally transduced to an optical transmission change of a microring resonator through the thermo-optic effect in silicon. The photothermal signal is further enhanced by locally removing the silicon substrate beneath the transducer, hereby increasing the effective thermal isolation by a factor of 40. As a proof-of-concept, the absorption spectrum of a polymer that has been locally patterned in the annular region of the resonator was recovered using photothermal spectroscopy. The spectrum is in good agreement with a benchmark Fourier-transform infrared spectroscopy (FTIR) measurement. A normalized noise equivalent absorption coefficient (NNEA) of 7.6 × 10–6 cm–1 W/Hz1/2 is estimated.

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