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Authors: Y. Shimura, A. Srinivasan, D. Van Thourhout, R. Van Deun, M. Pantouvaki, J. Van Campenhout, R. Loo
Title: Enhancement of Active Phosphorus Concentration in Ge CVD layers in View of Group-IV Optical Interconnections using Low Temperature in-situ Doping and High Order Ge Precursors
Format: International Conference Presentation
Publication date: 11/2015
Journal/Conference/Book: International Symposium on EcoTopia Science 2015
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