Photonics Research Group Home
Ghent University Journals/Proceedings
About People Research Publications Education Services


Publication detail

Authors: W. Xie, D. Van Thourhout
Title: High-Q Free-standing Silicon Nitride Microdisk Vertically Coupled with On-chip Waveguide
Format: International Conference Proceedings
Publication date: 6/2014
Journal/Conference/Book: CLEO 2014
Editor/Publisher: Optical Society of America, 
Location: San Jose, United States
DOI: 10.1364/CLEO_SI.2014.STu3M.3
Citations: Look up on Google Scholar
Download: Download this Publication (320KB) (320KB)


We designed and fabricated silicon nitride microdisk-waveguide vertical coupling devices processed at a low temperature of 270°. We experimentally demonstrate an intrinsic quality factor of 72000 in the disk with only 15ìm radius operating near 1310nm.

Related Research Topics

Related Projects

Back to publication list