Authors: | A. Masood, M. Pantouvaki, D. Goossens, G. Lepage, P. Verheyen, D. Van Thourhout, P. Absil, W. Bogaerts | Title: | CMOS-compatible Tungsten Heaters for Silicon Photonic Waveguides | Format: | International Conference Proceedings | Publication date: | 8/2012 | Journal/Conference/Book: | 9th International Conference on Group IV Photonics
| Volume(Issue): | p.234-236 | Location: | San Diego, United States | DOI: | 10.1109/group4.2012.6324144 | Citations: | 21 (Dimensions.ai - last update: 13/10/2024) 5 (OpenCitations - last update: 10/5/2024) Look up on Google Scholar
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Abstract
We present a Tungsten thermo-optic tuner on SOI, using standard CMOS back-end fabrication processes. Tuning efficiency of 35.2mW/FSR was achieved on ring resonators with 10%-90% heating time of 2.8ìs. Related Research Topics
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