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Authors: P. Dumon, W. Bogaerts, R. Baets, J.-M. Fedeli, L. Fulbert
Title: Towards foundry approach for silicon photonics: silicon photonics platform ePIXfab
Format: International Journal
Publication date: 6/2009
Journal/Conference/Book: Electronics Letters (invited)
Volume(Issue): 45(12) p.581-582
DOI: 10.1049/el.2009.1353
Citations: 80 (Dimensions.ai - last update: 13/10/2024)
58 (OpenCitations - last update: 3/5/2024)
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Abstract

Fabless access to wafer-scale silicon photonics technology is moving silicon photonics closer to becoming a mainstream technology and opens up new exciting areas for research at the same time. It is only by using wafer-scale technology that this emerging field will be able to realise its promise: to become a disruptive technology. At the basis of the rationale for silicon photonics is a complex of photonic functions integrated on a single chip, coupled to a stable, high-yield volume fabrication technology base. ePIXfab is a service platform offering R&D oriented access to state-of-the-art 200 mm wafer-scale CMOS technology optimised for silicon photonics purposes.

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