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Authors: W. Bogaerts, P. Dumon, V. Wiaux, J. Wouters, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, D. Van Thourhout, R. Baets
Title: Nanophotonic waveguides in Silicon-on-Insulator Fabricated with CMOS Technology
Format: National Conference Poster
Publication date: 12/2003
Journal/Conference/Book: 1st Flanders Engineering PhD Symposium
Volume(Issue): p.63
Location: Brussel, Belgium
Citations: Look up on Google Scholar
Download: Download this Publication (301KB) (301KB)


We have made nanophotonic waveguides with low propagation losses in Silicon-on-insulator. The structures were fabricated with advanced CMOS fabrication technology including deep UV lithography at 248nm. We demonstrate photonic crystal waveguides with losses of 10dB/mm and single-mode photonic wires with propagation losses as low as 2.4dB/cm. We used these waveguides to construct compact racetrack and resonators in these waveguides with a Q of up to 8000.

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