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Authors: W. Bogaerts, V. Wiaux, D. Taillaert, S. Beckx, R. Baets
Title: Photonic Crystal Waveguides in SOI fabricated with deep UV lithography
Format: International Conference Proceedings
Publication date: 9/2002
Journal/Conference/Book: European Conference on Optical Communication ECOC 2002
Volume(Issue): p.4.4.5
Location: Copenhagen, Denmark
Citations: Look up on Google Scholar
Download: Download this Publication (214KB) (214KB)


We demonstrate photonic crystals for 1550nm wavelengths fabricated with 248nm-excimer laser deep UV lithography in silicon-on-insulator, combining high resolution with mass-manufacturing. The structures are of high quality. Measurements show transmission through waveguides and sharp bends

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