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Authors: W. Bogaerts, D. Taillaert, R. Baets, V. Wiaux, S. Beckx
Title: Large-scale production techniques for photonic nanostructures using excimer laser replication
Format: International Conference Proceedings
Publication date: 7/2002
Journal/Conference/Book: Integrated Photonics Research (IPR) (invited)
Location: Vancouver, Canada
DOI: 10.1364/ipr.2002.ifh4
Citations: Look up on Google Scholar
Download: Download this Publication (766KB) (766KB)


We demonstrate wavelength-scale photonic structures for photonic integrated circuits fabricated with 248nm-excimer laser deep UV lithography. Deep UV lithography combines mass-manufacturing capability with the resolution needed for photonic crystals or other submicron photonic structures.

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